Compact PVD excellence for laboratory and R&D

MS 500 and MS 700 – The ideal PVD coating system for laboratory, research and development.

Your advantage:

• Open system
• Intuitive and flexible PVD Pro software
• Parameters are computer controlled, all settings are stored in a coating recipe
• Coating parameters are stored in real time – fully repeatable processes possible
• Remote control and monitoring
• Fully automated based on Siemens automation solutions (optional Schneider or Allen Bradley)
• Up to 6 magnetron sources (EP patent)
• Virtual shutter (optional)
• High flexibility in terms of coating elements used
• High flexibility regarding the possibility to develop new coatings
• Optical emission control for reactive processes
• Optional “Residual Gas Analyzer” (RGA) which is integrated in the automation and can be used for process control
• Various plasma cleaning options
• Plasma etching
• Integration of a linear ion source for gentler and more intensive plasma cleaning of the substrates and more intensive plasma cleaning of the substrates

The MS laboratory series combines many innovations in an extremely compact housing with easy access and maintenance. During development, we made sure that the MS laboratory series is extremely compact with a footprint of only 1600 x 1600 mm and combines all components relevant for operation in one housing:

1. Area for vacuum coating
   Up to 6 magnetrons with a special magnetic field design
2. Vacuum pumps area
   Maintenance and oil-free dry and turbopumps
3. rocess gas control system
   Up to 4 working gases, including reactive gases such as O₂, C₂H₂
4. Electrical area
   Up to 6 DC power supplies, 1 pulsed DC power supply with adjustable pulse length for plasma cleaning, bias and PECVD deposition

Possible coatings:

• Metals
• Nitride Ceramics
• Oxide ceramics
• Carbonitrides
• Reactive processes requiring high ionic energy

The system was designed according to the plug and play principle, and promises a very high level of user-friendliness in terms of operation and service.

The MS 700 can be customized according to customer specifications and is also equipped for the future thanks to its modular design.

The workpiece holder is flexibly designed, on the other hand the multi-cathode design, with our patented (magnetron) sputter sources, enables individual and multi-layer PVD coatings.

The flexible design of the MS lab series integrates linear ion sources.

The flexible programming of the software allows the reproducible production of multilayer structures, graded coatings and nanostructures.

Your advantages:

• Innovative Intuitive
• Easy to operate “Start/Stop
• Complete machine overview and control
• Integration of the cooling unit
• Continuous live trends for all parameters
• All parameters are stored in a historical archive with the possibility of export to Microsoft Excel
• Open interface for the adjustment of the coating parameters
• Secured by operating levels (operator, technical, service)

Target dimensions:

Metallic and ceramic targets, even brittle materials such as Cr, Si, Al₂O₃, can be changed without gluing.